Tactras Vigus Energy Equipment & Supplies

1 equipment items found

Tactras Vigus - Model 300mm - Plasma Etch System

Manufactured by:Tokyo Electron Limited (TEL) based inTokyo, JAPAN

Tactras™ Vigus™ is a highly reliable 300mm plasma etch system that enhances etch process productivity. Scaling at advanced technology nodes makes the etch process more and more crucial. As the solution for etch process challenges, Tactras™ Vigus™ provides customized options for high aspect ratio holes, trench etch, mask and dielectric etch, and BEOL dielectric ...

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